Solution: Obstacle avoidance of micro laser scanners in semiconductor cleanrooms
Scenario: 12-inch wafer handling (allowable vibration error ≤ 0.1mm).
Technical points:
A person enters the alarm area. When the radar detects that the person's position has invaded the user's predefined area, an alarm signal is sent to the control system through the signal line, and the alarm signal is displayed on the host computer software.
The XD-TOF-05D safety laser scanner enables 0.1° super-resolution scanning to identify 0.5mm-level wafer box offset;
Integrated piezoelectric ceramic brake (response time 1ms) to achieve nano-level path correction;
Electrostatic dissipation design of the shell (surface resistance <10⁶Ω), in line with SEMI E78-1102 standard.
Efficiency: The wafer breakage rate of the Nanjing plant has been reduced from 0.01% to 0.0005%.
FAQ
Q1. Are regional agents allowed?
Answer:Yes, our global investment agent
Q2, do you have this radar certificate?
Answer:We have CE/RoHS/IP65 and other certificates.
Q3: What are your delivery conditions?
Answer: UPS, DHL, TNT, FedEx, EMS.
Q4: What is your sample policy? A
Answer: If there is a spot, we can provide samples, but the customer must pay the sample fee and express delivery fee.
